Scanning Electron Microscopy and X-Ray Microanalysis

This text provides students as well as practitioners - engineers, technicians, physical and biological scientists, clinicians and technical managers - with a comprehensive introduction to the field of scanning electron microscopy (SEM) and x-ray microanalysis. The authors emphasize the practical aspects of the techniques described. Topics discussed include user-controlled functions of scanning electron microscopes and x-ray spectrometers, the characteristics of electron beam - specimen interactions, image formation and interpretation, the use of x-rays for qualitative and quantitative analysis and the methodology for structural analysis using electron backscatter diffraction. Special topics in SEM include high resolution SEM, low voltage SEM, variable pressure and environmental SEM, SEM metrology, stereomicroscopy, particle microscopy and special contrast mechanisms. Special topics in x-ray microanalysis include thin film, particle, and rough surface analysis, analysis of beam sensitive materials including biologicals and polymers, and preparation of the analytical report. SEM and x-ray microanalysis sample preparation methods for hard materials, polymers, and biological specimens are covered in separate chapters. In addition, techniques for the elimination of charging in non-conducting specimens are detailed. A database of useful parameter for SEM and x-ray microanalysis calculations and enhancements to the text chapters are available on an accompanying CD.